주사 전자현미경

(Scanning Electron Microscope)

규 격 서

2022.  7.

구 매 규 격 서

순번	품 명	세부품명번호	수량	단위	부서명	담당자 (연락처)
1	주사 전자현미경 (Scanning Electron Microscope)	41111720 (주사전자현미경)	1	set	전기화학연구실	이규환 (055-280-3545) 김민영 (055-280-3558)

Ⅰ. 용도 및 특성(End-user's Use and Feature)

본 연구 장비인 주사형 전자현미경(SEM)은 전자총에서 가속된 전자빔이 시편에 도달하여 발생되는 여러 전자 정보중 이차전자 및 반사전자를 검출하여 미소영역에 대한 상(최대배율 30만배) 관찰기능을 가지고 있을 뿐만 아니라 원소분석기능이 가능한 Energy Dispersive X-ray Spectrometer(EDS) 1 set 가 장착되어 시료표면에서 발생하는 X-선을 검출하여 미세영역에 포함되어 있는 원소들에 대한 정성, 정량 분석을 할 수 있다.

이 장비는 금속, 재료뿐만 아니라 섬유, 지질, 반도체, 세라믹등 다양한 분야에서 Image를 관찰하고 성분분석을 진행하여 연구용으로 필수적인 장비로도 널리 사용되고 있다.

Ⅱ. 장비의 구성 (Configurations of Goods)

1) 주장비

1. 주사전자현미경 본체	1 set

2. 모터 드라이브 스테이지	1 set

3. 오퍼레이션 유니트	1 set

4. LCD 모니터	1 set

5. EDS Kit 1	1 set

6. Dry SD60 검출기 유니트	1 set

7. 기본 소프트웨어	1 set

8. 컬러 Image 스테이지 네비게이션 시스템	1 set

9. 반사전자 검출기	1 set

10. Movable Aperture	1 set

11. Operation Panel	1 set

2) 부속장비

1. 테이블	1 set

2. Step down transformer for SEM	1 set

3. 자동조정 Au 코팅 시스템	1 set

4. 스페어 Parts

1) 필라멘트 K-type(12pcs/box)	2 bxs

2) 진공 Grease	1 ea

3) 시료대, 10D x 10H 10/ca	1 ea

4) 시료대, 32D x 10H 10/ca	1 ea

5) 카본 테이프, 20M	1 ea

Ⅲ. 성능 및 규격 (Performance and Specification)

A. Specifications

1. Performance

1-1. 분해능 : 3.0 nm (Acc.V 30 kV, SEI, HV mode) or better

8.0 nm (Acc.V 3 kV, SEI, HV mode) or better

15.0 nm (Acc.V 1 kV, SEI, HV mode) or better

1-2. 배율 : x 5 to x 300,000(149 steps)or wider

1-3. 가속전압 : 0.5 kV to 30 kV(53 step) or better

1-4. 탐침전류 : 1pA to 1μA or wider

1-5. EDS System : Built-in

1) 분해능 : 130eV or less

2) 검출가능 원소 : 4Be to 92U or more

2. Electron Optical System (EOS)

2-1. 전자총

1) Electron source : Pre-centered W hairpin-type filament

2) Gun alignment coil : Electromagnetic 2-stage deflection

3) Bias voltage : Self-bias voltage

4) Line scan profile : Filament heating support function

5) Auto gun control : Automatic filament heating, automatic gun

alignment adjustment. Full automatic.

6) Beam blanking : Prevents damage to specimen

2-2. Lens System

1) 집속렌즈 (CL) : High-precision zoom condenser lens

2) 대물렌즈 (OL) : Conical objective lens,

Differential pumping should be supported

3) 대물렌즈 aperture : 1-step, fine position adjustment in

X and Y directions should be possible

4) 비점수차 coil :	Electromagnetic 8-pole X-Y adjustment

5) 자동 초점 coil : For automatic focus

6) Lens reset : For removing hysteresis

7) Zoom 기능 : Prevention of changes in focus

when the probe current is changed

8) Wobbler : Axis alignment function for the objective lens aperture

9) Stigmator preset : Linked with loading the stigma preset value, the accelerating

voltage and WD.

10) WD display : Displays the working distance

11) 자동 초점 : Automatic focus adjustment

12) Automatic focus tracer : Focus tracing function that is linked with the variation in

the stage stage Z coordinates.

13) Tilt 보정 : A specimen is tilted for focus shift correction.

2-3. Scanning System

1) 주사코일 : Electromagnetic 2-stage deflection

2) Image shift coil : Electromagnetic 2-stage deflection

3) Scan Rotation :	Image rotation correcting function for WD should be include

4) Linearity correction for horizontal/vertical scan :

Specifies the scan rotation angle for the straight line on the

observation screen and corrects so that the straight line

should be horizontal or vertical

5) CF scan : Reduces charging in specimens.

6) Preset magnification : 6 types of magnifications should be set

7) Image shift : Electromagnetic field shift, approx. ±50μm

in X & Y direction(10mm WD)

8) Trapezoid correction : On the field of view with a tilt, the magnification should be

corrected for the front and the rear side with the screen

center as a reference point.

3. Specimen Stage

3-1. 시료대 움직임 : 2 axes (X, Y) motor driven, CPU control or more

3-2. 시료대 움직임 범위

X 축 : 80 mm or wider

Y 축 : 40 mm or wider

Z 축 : 5 to 48 mm or wider(Eucentric movement & Focus range)

Tilt (T) : -10 to +90° or wider

Rotation (R) : 360° endless or wider

3-3. 시료 홀더 : 32mm D x 10mm H or more

The adapter that should be attach the four specimen blocks

(10mm D) included.

3-4. 최대 시료 크기 : 150mm dia. mount or bigger

117mm dia. : entire observation allowed

(by R-axis rotation)

3-5. 시료 교환 : Draw-out mechanism

4. Electron Detector

4-1. 고진공 모드

1) 이차전자 검출기 : E.T. (Everhart-Thornley) detector

2) 반사전자 검출기 : Semiconductor detector

3) EDS 검출기 : Silicon drift detector

5. Display System

5-1. Display : 23.8 inch multi-touch supported monitor or bigger

5-2. Display resolution : 1920 × 1080

5-3. GUI display size : Adjustable(Maximum size: 1920 × 1050)

5-3. Image memory(pixels) : 640 x 480 , 1,280 x 960 , 2,560 x 1,920 , 5,120 x 3,840

5-4. Image integration function

Exponential integration : Frame integration processing with exponential weighting.

For live image observation.

Averaging coefficients should be set from 1 to 255.

Frame integration : Frame integration processing with simple average weighting.

For acquiring saved image data. An arbitrary number of

frames(1 to 2,048) should be integrated.

Noise removal filter : Noise removal filter ON/OFF. Selected from “Standard“ and

“Strong”. RDC or FAST mode should be set.

5-5. Image Display Function

Full screen display : Displays the live image and saved images on the entire screen.

Multi-screen display : Displays the live image on two screens.

Flexible window : Displays any rectangular area on the observation screen

with different types of signals.

Signal addition : Displays an image with 2 mixed signals for one image.

5-6. Image adjustment function

Gamma correction : The image contrast should be corrected using gamma curves.

Digital correction : Digital contrast correction, digital brightness correction

binary coding, color invert, smoothing.

Pseudo-color display : The image should be displayed in color. Selection of fixed

or custom setting and color image saving can be performed

5-7. Measurement functions

Two-point measurement(straight, arbitrary, perpendicular) :

Measurement of the distance between the straight line

segment connecting any two points and the length of a

series of connected straight line segment.

Line width measurement(parallel X-Y, diagonal) :

Measurement of the distance between two horizontal or vertical

parallel line segment. If a rectangle is defined by pairs of horizontal

and vertical lines, its diagonal length should be measured.

Angle measurement : Measurement of the angle between two line segments that

extended from a center point.

Area measurement(rectangle, circle, polygon) :

Measurement of an area surrounded by a polygon

or a circle(including ad ellipse).

Count(click) : Counts and displays the number of times you clicked on the image.

Measurement and calibration function :

High-accuracy measurement should be possible by measuring

the sample based on the length of the calibration standard sample.

5-8. Text insertion

Display position : Displayed at any desired position on the image.

Display contents : English

Font : Any font installed in the operation unit should be selected.

Input method for text entry : Keyboard or touch screen

5-9. Photo data display

Display position : Horizontal display at the lower part of the image

Display contents : Signal, Accelerating voltage, WD, Probe current, Vacuum mode,

Magnification, Micron marker, Text label, Image number,

Date, and Logo image.

5-10. File saving

Image file : Should be saved in BMP, TIFF or JFEG format.

Video file : Should be saved in VAI format.

5-11. Customization

Automatic function settings :

Auto-link setting and auto-contrast/brightness

adjustment should be performed.

UI layout : Navigator area, icon position and background color change

Language selection : Japanese or English should be selected

Photo data editing : Background color, font/font background color,

label, photo number, date, logo image should be edited.

6. Operation System

6-1. Basic system

Operation unit

CPU : Intel®CoreTMi5 or an equivalent product

OS : Windows® 10 or better

6-2. Operation method : Mouse/keyboard operation, graphical user Interface(GUI)

Touch screen operation.

6-3. 자동화 기능

자동 Gun 조정(AGC) : Filament-heating temperature setting and the filament

alignment are performed automatically.

자동 contrast/brightness(ACB) :

Automatic adjustment of the image contrast and brightness

should be performed.

자동 초점(AF) : Focus adjustment should be performed automatically.

자동 비점수차(AS) : Astigmatism should be corrected automatically.

6-4. Observation support functions

Snapshot : Max. of 6 screen(Freeze image) should be pasted at the side of the

image display area, and stage position should be controlled on these images.

Click center : Double-clicking any point in the image-display area moves

the point to the center.

Drag : Dragging any point in the image-display area moves the

point to any desired position.

Frame shift : Moves the image by a specified rate. A video file should be

saved in AVI format. The Max. recording time depends on

the capacity of the hard disk fo the PC.

Scan rotation : The scan direction should be rotated in the range from

–180° to +180° without moving the stage.

Histogram : The brightness histogram of the observed image should be displayed.

Stereo :	In the same field of view, the instrument acquires the tilted

image as well as the image before it was tilted and

produces an anaglyph image or a 3D measurement image.

Montage : Multiple successive images should be combined and

displayed as one image.

Probe tracking :	Corrects the observation position shift that occurs with time

Eco mode : If you do not operate on the operation unit for a certain

period of time, the system enters energy saving mode.

Zeromag mode : If you decrease the magnification by using the mouse wheel

or pinching in on the observation window, or using the optional

operation panel, the holder graphics at the lowest magnification for

each WD, or the image captured using the optional stage navigation

system should be displayed, and the image acquired before the

current session is overlapped and displayed as a composite image.

6-5. Recipe function

Standard recipe : When the operator selects the type and condition of the specimen,

the image should be displayed in the most suitable condition for

that specimen. The observation conditions should be saved and loaded.

Customized recipe : Each user should be save and load conditions for the EOS

system, stage coordinates, and vacuum mode. An unlimited

number of recipes should be created.

6-6. Image management function

Simple data list : Thumbnail display of the saved image Viewer used to open

the saved SEM images and the EDS data easily.

Data control window : Viewer used to manage the saved image and the

EDS data, or the created reports and layouts.

Report creation function : Saving, exporting, thumbnail display, print preview,

and layout selection for a report.

6-7. User management

User level setting : Administrator and general user settings, password settings.

User control : User registration, deletion, addition, change functions.

6-8. Help function :	Processes such as the observation procedure, function

operation and maintenance should be displayed.

7. Evacuation System

Control method : Fully automatic

Ultimate pressure : 1mPa or less

Start time : Approx. 3 min. or less

Time required for evacuation : Approx. 3 min. or less

Venting time : Approx. 1 min. 30 sec. or less

Rotary pump : 100L/min or more

Turbo molecular pump :	68L/sec or more

8. EDS-Related Specifications

8-1. Dry SD extra detector

Detection element type :	Silicon-Drift Detector(SDD)

Detection element area :	60mm2 or more

Effective detection area :	17.5mm2 or more

Energy resolution : 130eV or less(ICR 5,000 cps or less)

Window : Silicon nitride membrane

Detectable elements : Be to U or more

Cooling method : Peltier cooling

8-2. Digital pulse processor(DPP5E)

Max. output coefficient :	180kcps or more

Number of energy channels : 2,000 channels

Energy width : 10eV/ch

8-3. EDS function

8-3-1 EDS monitoring

Counting rate monitoring : Displays the counting rate and the dead time

measured by the EDS hardware.

Instrument adjustment function :

The user should be adjust the instrument as necessary.

8-3-2 Spectrum monitoring

Displays a spectrum and element label in the simplified manner during

observation, which the operator should be check.

8-3-3 Spectrum analysis function

Measure an X-ray spectrum on the specified position or region and analyzed the spectrum.

Spectrum measurement

Measurement region : Whole, point, area, arbitrary, particle.

Termination condition : Real-time, Live-time, ROI accumulation.

Probe current measurement : Automatic, The probe current detector(PCD) and the probe

current correction unit(optional) should be required

Energy range :	20keV

Spectrum display

Scale(horizontal axis) : Linear

Scale(vertical axis) : Linear, log, root

Element label :	Element symbol + main line(K,L,M) + sub-line

KLM marker : Main and sub-line of the characteristic X-ray, escape, sum peak

Comparison display : Multiple, list(two or more spectra should be comparaed)

Qualitative elements(Max.32 element should be obtained)

Automatic identification : Identifies the spectrum of an unknown specimen using

the standard spectra.

Manual identification(peak identification) :

The peak position on the specimen and the KLM marker

should be compared by selecting elements from the

candidate elements list.

Visual peak identification : A synthetic spectrum should be created from the elements

detected by qualitative analysis, and this spectrum should be

compared with the measured spectrum.

Periodic table :	The operator should be check the element detected by qualitative analysis

and specify the manually identified elements.

Quantitative Analysis

Standardless quantitative analysis : Calculates the concentration of an unknow specimen by

using a the standard spectrum.

8-3-4. Line analysis function

Function to measure positions arranged on a straight line and display the change

in intensity as a graph.

Line measurement

Measurement position : Horizontal, selected direction.

Line width :	By specifying a certain width for the target line to be

measured, an average result should be obtained.

Line display

Image display : Parallel display of a SEM image and the graph is possible

Graph display : The line measurement results are displayed on a graph

8-3-5. Map analysis function

Map measurement

Measurement region : Whole, area

Dwell time :	0.1, 0.2, 0.5, 1.0, 2.0, 5.0, 10.0, 20.0, 50.0, 100.0,(ms)

Resolution :  64 x 48, 128 x 98, 256 x 192, 512 x 384, 1024 x 768,

2048 x 1536, 4096 x 3072(pixels)

Map display

Individual element display : Up to 32 elements

Color synthesis map : SEM image and map image

Curve fitting map

Display map images from which curve fitting and background elements were removed.

Output resolution : 64 x 48, 128 x 98, 256 x 192, 512 x 384, 1024 x 768,

2048 x 1536, 4096 x 3072(pixels)

Output valur : Net count, quantitative value(ZAF)

Popup spectrum

When any region on the map is specified, a spectrum in that region is extracted

and displayed.

Extraction region : Point, area

Number of spectra that should be extracted at one time : Up to 32

Filter

Type : Averaging, weighted averaging, Laplacian, Sobel, Median, Gradient, Bilateral

8-3-6. Other anatical functions

Probe tracking

Corrects observation position shifts that have occurred over time.

Correction interval : Shortest interval of 1 sec.

8-3-7. EDS Interface

Incorporated in the SEM main unit.

IV. Remarks

1. 설치

장비 설치는 검증된 엔지니어에 의해 설치 진행되어야 함.

2. 장비 보증기간

장비 보증기간은 장비의 제작사로부터 제공되며, 설치 완료 후 12개월 동안 제공됨.

3. 사용 교육

장비 사용 교육은 무상으로 진행되며, 설치 완료 후 검증된 엔지니어에 의해 사용 교육이 진행됨.