KIMS developed a new ceramic material for semiconductor manufacturing equipment
Contaminant particles an obstacle to miniaturization of Semiconductor line width, can be resolved! A Korean research team succeeded in developing manufacturing technology for plasma-resistant nanostructured composite ceramics for the first time in Korea. With this technology, the particle issue, an obstacle to miniaturization of semiconductor line width, can be resolved. The research team, led by Dr. Young-Jo Park, conducted the research jointly with MiCo Ceramics Ltd. (CEO ...